Summary:
In this position at IME, you will be part of Advanced Process Module (APM) team developing and maintaining LPCVD poly-Si, TEOS oxide and low stress SiN processes for SiC power and Si/Ge-based photonics devices. Besides, you will also look after oxidation and dopant activation / damage anneal process. In this role, you will work closely with SiC and Photonics process integration & device design teams as well as key customers.
Responsibilities:
- Process qualification and acceptance of LPCVD, Oxidation and Activator furnaces.
- Process development and process maintenance of LPCVD poly-Si, TEOS oxide, Low-stress SiN, ultra-high temperature oxidation, pre/post oxidation annealing, dopant activation and damage annealing for SiC power and Si/Ge-based photonics devices.
- Performing in-line and offline metrology for respective processes.
- Responsible for process quality and process deviation/ issue troubleshooting.
- To provide technical support for technology transfer and process release requirements.
- Prepare Standard Operation Procedure (SOP), Out of Control Plan (OCAP) and other technical documentation for fab line to follow.
- Design of experiments and execution for process development and troubleshooting.
- Coordination with equipment team for maintenance of the tool.
- Preparation of technical presentations, publications, and technology disclosures.
- Working with IME's power electronics-related team to solve key technical challenges in the SiC power electronics industry.
Qualifications:
- B.Sc/M.Sc in Materials Science / EE / Physics or equivalent degree with 5 years hands-on experience in the field.
- Strong communication, industry awareness, and problem-solving skills.
- Highly motivated to succeed, a self-starter who is driven and able to work with others effectively to "get things done".
- Knowledge of RTP process with some experience will be a plus.
The above eligibility criteria are not exhaustive. A*STAR may include additional selection criteria based on its prevailing recruitment policies. These policies may be amended from time to time without notice. We regret that only shortlisted candidates will be notified.
