Job Description:
- Responsible for developing and optimizing ion-implantation and rapid thermal anneal (RTA) processes to support IME's various program requirements.
- Responsibilities include diagnosing malfunctions and using test equipment or software to test faulty hardware parts, applying knowledge of the functional operation of the Ion implanter and RTA equipment.
- Collaborates closely with vendors to optimize equipment performance and reduce tool downtime.
- Setup and execute design of experiments (DOEs) at various dose, energy, tilt, and twist levels, and evaluate experimental data to meet required process specifications.
- Responsible for analyzing test data related to implant-related defect formation, and quantifying and minimizing defects.
- Champion process window characterization and evaluation to drive quality and yield improvement.
- Closely collaborate with process integration teams to implement technology roadmaps, define process capability requirements, and address structural implications and constraints related to ion-implantation and RTA processes.
- Work with fab team in establishing statistical process control for ion-implantation and RTA processes.
- Generate and present reports to both internal and external customers.
Requirements:
- Bachelors/Masters in Materials Science and Engineering, Physics, Electrical Engineering, or closely related fields are welcome to apply.
- 3 years direct industry experience in ion-implantation, RTA and SiC MOSFET fabrication is preferred.
- Extensive proficiency in medium and high energy/current ion implantation, and RTA processes, including a comprehensive knowledge of equipment, equipment parts, and troubleshooting techniques to minimize equipment downtime.
- Good understanding of wide bandgap semiconductor materials and their corresponding dopant species.
- Expertise in ion channeling, ion bombardment, and their impact on the implant species profile.
- In-depth comprehension of defect formation and annihilation processes in the implanted region of semiconductors.
- Familiarity with essential device properties resulting from ion implantation and RTA processes.
- Understanding of the hardware of ion-implantation and RTA systems is advantageous.
- Knowledge and prior hands-on experience on basic process characterization techniques such as SEM/TEM, EDX, SIMS, Ellipsometry is advantageous.
- Possess good interpersonal and oral/written communication skills, with ability to deliver clear and concise messages to both internal and external stakeholders.
